ALL CATEGORIES

Offset Inline Pneumatic Vacuum Valve

Zero Length Viewport

A&N Corporation QF25-ZVP

New Surplus --  Never Used

Rotary Vane Vacuum Pump 2015 SD Pascal

Compact Dry Vacuum Pump

Capacitance Vacuum Gauge

The RAS Split Inductor is designed for use with Advanced Energy PE
or PEII 10 kW (or lower) power supply systems

Radio Frequency Generator

Profibus communication board for Advanced Energy CESAR generators

• Cline Innovations owns multiple IPX power supplies and other goods related to vintage Astex RF heated stages.
• Please don't hesitate to contact Cline Innovations if you need support to maintain your system, are seeking a spare power supply, feel you need a power supply repair, etc.

RF Plasma Generator

Representative photo

Radio Frequency (RF) Generator

Formerly RF Power Products

Direct Current Power Supply

E-Beam Deposition System

Two Stage Rotary Vacuum Vacuum Pump 

Pumping speed and ultimate pressure are based on 60 Hz operation.

Two Stage Rotary Vacuum Vacuum Pump

Pumping speed and ultimate pressure are based on 60 Hz operation.

Alcatel 2010 SD Pascal

Dual Stage Rotary Vane Vacuum Pump

Two Stage Rotary Vacuum Vacuum Pump

Pumping speed and ultimate pressure are based on 60 Hz operation.

Rebuilt Turbo Pump

Rebuilt Turbopump

Electro-Pneumatic Angle Vacuum Valve

Dry Helium Leak Detector

Turbo Pump with Controller and Cable
Unused Surplus

Roots Pump

Pump sold AS IS

Turbo Pump with CFF 450 Controller

Software Ver: B6.50

CB1 Amps: 300A

Vita Controller

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

 Standard pneumatic waferlift

Center Finding System: OTF

Buffer robot: HP+

Piezocon sensor: No

VSB: Yes

Wide Body LL

Tool called "EPI39"

Brand new and unused EPI Centura ACP 300 mm

4 Chambers;  Chamber code RH3, Lamp type BNA8 R3
Mainframe Configuration E4 Single, 4 Facet SC ENP BLK2, Loadport AMAT Standard 300mm, EPI Water Module LT Design. RP EPI

Tool out of Project: "Yu Shan"

The original rough IFX Equipment procurement value was ~10,3 M€

Will be now sold for an attractive price.

 Equipment is... 

...brand new 

...never used  

...original packaged and crated 

...located in Asia 

...complete and fully functional 

...professional stored in Warehouse

APPLIED MATERIALS Centura TPCC EPN 

• Serial Number 21693; Manufactured in 2011
• Electro Polished Nickel Frame & Modules
• 2ea ENP Centura Loadlocks for 200mm Wafers
• Wafer Transfer Chamber with HP Robot
  • High Temperature Quartz End Effector
  • On the Fly Wafer Centering
• 2ea TanOx Chambers - Positions C & D
• 2ea ENP Fast Cooldown Chambers
• V452 Main Control Board
• Gas Panel with 2ea Gas Pallets
• Interconnect Cables
• AC Distribution Rack – 160A
• Through the Wall Installation Kit
• Please Inquire for Additional Details

no Chuck, no PSUs, No Evs

beside this complete

• For use with compatible Astex 1kW switching microwave power supplies.

• Cline Innovations is offering a refurbished 2.5kw microwave generator set including:
  • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
  • Water-cooled 2.5kW magnetron head with variable output.
  • Water-cooled 3-way circulator with integrated directional coupler.
  • All interconnecting cables for the above components.
• Separate sale of the rack-mounted power supply or compatible magnetron heads will be considered upon request.
• This specific microwave generator has been tested by Cline Innovations and is ready to ship with relatively short lead-time. 
• This generator design enables manual (local) control using front panel LCD display & controls was well as computer interface control options. 
• A limited warranty can be considered depending on the application.
• Photos available upon request.

• This in-stock equipment is offered for domestic sale within the USA only. 
• Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
• Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
• System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
  • Chamber cleaning,
  • Computer control updates,
  • Higher throughput water cooling subsystem,
  • Replacement of selected o-ring components with metal seals, and
  • Enhanced process control/monitoring devices.
• The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
• Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
• Photo Note: System photo shown include a similar quality, similar vintage system sold in the past.  Actual photos or inspection available to qualified customers only.

Custom built for industrial R&D, this high plasma power density system is activated by ECR-enhanced, 2.45GHz microwave input offers a unique design for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.

Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This system was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with ECR magnets.

• Cline Innovations has inventory of Astex HV Cables of various types and lengths. 
• Current inventory includes cables which fit AX2115, S-1500, S-1500i, A5000, and AX2040 microwave generators rated for as much as 10,000 Watts.
• Please don't hesitate to contact us if you are in need of a cable.  Please consider sharing photos and length information for your existing cable (if you have one) in addition to images of the back panel of your power supply.