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Single Chamber PECVD Tools

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Item IDItem DescriptionSize RangeCass to CassLoadlock#PriceNotes Location
MakeModelSet SizeLoadlock Y/N
184607 Astex AX5000, AX6000, AX6350 or similar 1 F* Leominster, MA
189843 Astex AX6500 "Clamshell" MPCVD 1 F* Leominster, Massachusetts
137483 Astex ECR-MOCVD-PECVD 1 F* Leominster, Massachusetts
187926 Cline Innovations Custom CVD Diamond System 1 F* Leominster, MA
11074 Nexx Systems Cirrus 300YES 1 F* Scotia, NY
181540 Oxford Instruments Plasmalab System 100YES 1 F* Scotia, NY
147470 Plasma-Therm 790 PECVD 11" 1 F* Scotia, NY

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  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Single Chamber PECVD Tools:
Astex, Cline Innovations, Nexx Systems, Oxford Instruments, Plasma-Therm