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Your search for Manufacturer: Astex
found:
  • 11 Listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
168726
Astex  

Astex  

AX2107 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ASTeX (MKS Instruments) AX2107 Microwave Generator 2.45GHz:
  • ASTeX AX2107 700 Watt switching microwave power supply
  • Offered as a power supply only or as a microwave delivery subsystem equipped with magnetron head, cables, and selected waveguide goods.

 

1   Leominster, Massachusetts
168802
Astex  

Astex  

HS 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1   Leominster, Massachusetts
168803
Astex  

Astex  

HS-1500, HS1500 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

Astex HS-1500 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1   Leominster, MA
168804
Astex  

Astex  

HS-1000, HS1000 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

Astex HS-1000 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
1   Leominster, MA
206579
Astex  

Astex  

SXRHA 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ASTEX MAGNETRON HEAD:

Magnetron Head

2   Scotia, New York
213180
Astex  

Astex  

AX2518 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ASTeX AX2518 SmartPower Microwave Power Supply:
  • Used switching power supply intended for use in ASTeX 1.8kW SmartPower generator set.
  • Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods.  Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
  • If you have a 1.8kW microwave delivery set and are seeking a spare power supply, these goods may be a good low cost option for you to consider. 
  • Please contact Cline Innovations to discuss your needs and options for testing.  Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
  • Goods can be sold with a limited warranty.
1   Leominster, Massachusetts
222258
Astex  

Astex  

S-1500i S1500i 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

ASTeX S-1500i Microwave Generator 2.45GHz:
  • Used 1.5kW microwave generator set including the following ASTeX goods:
    • 19-inch rack-mount, switching power supply
    • 3-way circulator with integrated directional coupler
    • Water-cooled dummy load
    • Reflected power diode and associated cable.
    • High Voltage Cable
    • Control Cable
  • Good have already been tested at full power at Cline Innovations.
  • Power supply and mag head both use the larger/preferred HV cable military connector design common to newer-vintage power supplies.
  • Photos coming soon & available upon request.
1   Leominster, Massachusetts
225956
Astex  

Astex  

2.5kW 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

Astex 2.5kW switching microwave generator set:
  • The complete tested, refurbished 2.5kw microwave generator set includes:
    • 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
    • Water-cooled 2.5kW magnetron head with variable output.
    • Water-cooled 3-way circulator.
    • All interconnecting cables for the above components.
  • Operational and ready to ship with relatively short lead-time. 
  • Limited warranty can be considered depending on the application.
1   N* Leominster, Massachusetts
137483
Astex  

Astex  

ECR-MOCVD-PECVD 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

ASTeX Large Volume Plasma Processing System (ECR-PECVD-MPCVD-MOCVD):

High density plasma system activated by ECR-enhanced, 2.45GHz microwave input offers PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.


Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This is a flexible R&D or semi-production system that was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with two ECR magnets.

1   Leominster, Massachusetts
184607
Astex  

Astex  

AX5000, AX6000, AX6350 or similar 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

Astex AX5000 Microwave Plasma Diamond Growth System:
  • Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
  • System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
  • Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
  • This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
  • 1.5kW to 5kW microwave power input.
  • 3 stage options: Cooled, Heated, or Thermally Floating.
  • Integration with computer controls is strongly recommended.
  • Chamber designs vary by vintage, but can be confirmed at the time of quotation.
1   F* Leominster, Massachusetts
189843
Astex  

Astex  

AX6500 "Clamshell" MPCVD 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

Astex AX6500 Bottom-launch Diamond Growth System:
  • This in-stock equipment is offered for domestic sale within the USA only. 
  • Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
  • Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
  • System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
    • Chamber cleaning,
    • Computer control updates,
    • Higher throughput water cooling subsystem,
    • Replacement of selected o-ring components with metal seals, and
    • Enhanced process control/monitoring devices.
  • The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
  • Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
  • Photo Note: System photo shown include a similar quality, similar vintage system sold in the past.  Actual photos or inspection available to qualified customers only.
1   Leominster, Massachusetts

NOTE:
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   reference document attached
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  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.