System Consist of Two Chambers Segregated by a rectangular Gate Valve With a Specimen Transfer System
Chamber 'A' Ion Milling Turbo Pumped
Chamber size: 23"W x 28.5"D x 9"H
Chamber Access: Doors on Front and Side of Chamber
Two vacant 6" ports top of chamber,one KF 40 rear of chamber,
Specimen Transfer: Gear Driven Chamber to Chamber
Ion Mill: Commonwealth 3CM Ion Source
Turbo Pump: Varian TV 250
Vacuum Gauges: Ion and Thermocouple
Chamber Heat: 1000 Watt Quartz Heater
Chamber view port: 3"
Specimen Rotation
Specimen Platten #1 18.5" Diameter,Four 5" Wafers Plus four detents for 4", 2.5" and 3" Wafers
Specimen Platten #2 18.5" Diameter, Four 6" Wafers
Two above platens supplied with system
Chamber 'B' Sputtering Cryo Pumped
Chamber size: 23"W x 28.5"D x 9"H
Chamber Access: Doors on Front and Side of Chamber
Two Vacant KF 40 Ports top of Chamber,Four 1"Dia. ports bottom of chamber
Chamber view port: 3"
Specimen Rotation
Motorized Shutter
Vacuum Gauges: Ion and Thermocouple
Cryo Pump: CTI Cryogenics Cryo Torr 8
Compressor: CTI Cryogenics 8200
Cathodes: Five Siera Applied Sciences 6" DC Magnetron
Control Components
Commonwealth IBS 250 Ion Source Controller
Varian Dual Gauge Controller
Varian V250 Turbo Pump Controller
Pinnacle DC Magnatron Drive
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