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Your search for Manufacturer: Astex
found:
  • 9 individual listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
115837
Astex  

Astex  

S-1000i 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

1   F* Sterling, MA
ASTeX S-1000i (1KW) Microwave Power Supply, Magnetron, and Waveguide components:
  • Rack-mounted S1000i Power Supply, Magnetron Head, Cable and Waveguide components.
  • This is an older vintage power supply which is only recommended to customers who are already supporting related Astex microwave goods.
  • This unit has been tested in the past.  Re-testing can be expedited upon request. 
  • Repair or replacement of the A/C cord needs to be coordinated before shipment.
168726
Astex  

Astex  

AX2107 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

1   Leominster, MA
ASTeX (MKS Instruments) AX2107 Microwave Generator 2.45GHz:
  • ASTeX AX2107 700 Watt switching microwave power supply
  • Offered as a power supply only or as a microwave delivery subsystem equipped with magnetron head, cables, and selected waveguide goods.

 

168802
Astex  

Astex  

HS 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

1   Leominster, MA
Astex HS Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
168803
Astex  

Astex  

HS-1500, HS1500 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

1   Leominster, MA
Astex HS-1500 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
168804
Astex  

Astex  

HS-1000, HS1000 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

1   Leominster, MA
Astex HS-1000 Air-Cooled Magnetron Head:
  • For use with compatible Astex switching microwave power supplies.
171379
Astex  

Astex  

S-250 

List all items of this typeRadio Frequency (RF) Generators

in PVD Power Supplies

1   F* Leominster, MA
Astex S-250 250W Microwave Power Generator:
  • Compact S250 110 Volt unit.
  • Variable power output in range of 10-250W CW.
  • WR284 waveguide output easily adaptable to coax microwave delivery.
  • TESTED and ready to ship on short notice.
137483
Astex  

Astex  

ECR-MOCVD-PECVD 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

1   F* Leominster, MA
ASTeX Large Volume Plasma Processing System (ECR-PECVD-MPCVD-MOCVD):
High density plasma system activated by 2.45GHz ECR microwave offers low temperature plasma for PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, diamond & related carbon materials, and nanomaterials.

Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area/volume MOCVD/PECVD/deposition of ceramics/semiconductors/DLC/nanodiamond/nanomaterials, surface treatment & functionalization and/or dry etching.

This is a flexible R&D or semi-production system that was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with two ECR magnets.

184607
Astex  

Astex  

AX5000, AX6000, AX6350 or similar 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

1   F* Leominster, MA
Astex AX5000 Microwave Plasma Diamond Growth System:
  • Multiple stainless steel, Astex microwave plasma CVD chambers and plasma couplers currently available as the basis for refurbishment and reintegration.
  • Systems can be reintegrated based on customer's application needs using a combination of reliable, new and used/refurbished components.
  • This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
  • 1.5kW to 5kW microwave power input.
  • 3 stage options: Cooled, Heated, or Thermally Floating.
  • Computer controls.
189843
Astex  

Astex  

AX6500 "Clamshell" MPCVD 

List all items of this typeSingle Chamber PECVD Tools

in Production Tools

1   F*N* Leominster, Massachusetts
Astex AX6500 Diamond Growth System:
  • Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
  • Capable of high rate single-crystal (SCD) diamond homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD), ultrananocrystalline diamond (UNCD).
  • System to be refurbished & updated with modernized computer controls, higher throughput water cooling subsystem, and enhanced process control/monitoring devices.
  • The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
  • Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
  • This system can be customized to meet customer needs and preferences.  Please contact Cline Innovations for details.

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