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Cluster PECVD Tools


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Item IDItem DescriptionSize RangeChambersProc Capablitis#PriceNotes Location
MakeModelSet Size
$
56326 Applied Materials P5000100 mm3Can be configured to your specifications 1 F* Scotia, NY
23215 Applied Materials P5000 MARK II3TEOS Deposition, Oxide Etch 1 F* Scotia, New York
30246 Plasma-Therm VLR 700 VLR-PM1-ICRB-PM100 mm1Nitride Depostion 1 F* Scotia, NY

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  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Cluster PECVD Tools:
Applied Materials, Inc., Plasma-Therm