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LPCVD Tools


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     Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
    Make Model
      $  
    183417

    ASM  

    A412 Dual Reactor  

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Malta, New York
    ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
    ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
    Twin LPCVD As Doped Reactors

    TOOL ID: FVX2560

    Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

    2011 Vintage

     

    Tool ID: FVX2560

    183418

    ASM  

    A412 Dual Reactor  

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Malta, New York
    ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
    ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
    Twin LPCVD As Doped Reactors

    TOOL ID: FVX2561

    Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

    2011 Vintage

     

    Tool ID: FVX2561

    181651

    ASM  

    A412 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Taichung, Taichung City
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    Dual Furnace LPCVD Reactor
    Reactor A is LPCVD SiN (DCS) DF-NDP-12
    Reactor B is LPCVD SiN (DCS) DF-NDP-14

    183169

    ASM  

    A412 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 F* Malta, NY
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    Twin LPCVD SiN Reactors

    TOOL ID: FVX2541

    2011 Vintage
    183170

    ASM  

    A412 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Malta, New York
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
    Twin LPCVD SiN Reactors

    TOOL ID: FVX2540

    2011 Vintage

     

    Tool ID: FVX2541

     
    181649

    ASM  

    A412 

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    in LPCVD Furnaces

    1 Taichung, Taichung City
    ASM A412 Vertical Furnace, 300mm, LPCVD SiN & TEOS
    Manufactured in 2005; Status: Bagged and Skidded
    A412 Smart Batch
    Dual reactor LPCVD.
    Reactor A is LPCVD TEOS Oxide deposition
    Reactor B is LPCVD Silicon Nitride
    S/N: 30245
    178276

    ASM  

    A412 

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    1 F* Taichung, Taichung City
    ASM, A412 Ovens / Furnaces, 300mm
    Manufactured in 2005; Status: Bagged and Skidded
    Dual reactor LPCVD.
    Reactor A is LPCVD Silicon Nitride
    Reactor B is Phos Doped Poly silicon
    S/N: 30236

    137544

    Aviza Technology Ltd  

    Aviza Celsior mainframe for 12" / 300 mm 

    List all items of this typeBenchtop LPVCD Furnaces

    in LPCVD Furnaces

    1 F* Regensburg, BY
    Aviza Celsior mainframe
    Aviza Celsior mainframe



    Aviza Celsior mainframe
    Equipment Code: CVD304-04

    LOCATION: Dresden
    137540

    Aviza Technology Ltd  

    Aviza Pantheon Mainframe for 12" / 300 mm 

    List all items of this typeBenchtop LPVCD Furnaces

    in LPCVD Furnaces

    1 F* Regensburg, BY
    Aviza Pantheon Mainframe
    Aviza Pantheon Mainframe
    Equipment Code: CVD304-03


    Aviza Pantheon Mainframe with 3 chambers
    Serial Number: OX0412-005
    137566

    Tokyo Electron Ltd  

    OfenTel Minibatch (NITRID) for 12" / 300 mm 

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    in LPCVD Furnaces

    1 F* Regensburg, BY
    Furnace TEL Minibatch (NITRID)
    OfenTel Minibatch (NITRID)
    Equipment Code: OFE361-01

    TEL Formula Minibatch furnace for Nitride, 4


    OfenTel Minibatch (NITRID)
    Serial Number: P00000315001
    137567

    Tokyo Electron Ltd  

    OfenTel Minibatch (OXID) for 12" / 300 mm 

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    in LPCVD Furnaces

    1 F* Regensburg, BY
    FurnaceTel Minibatch (OXID)
    OfenTel Minibatch (OXID)
    Equipment Code: OFE361-02

    TEL Formula Minibatch furnace for Oxide


    OfenTel Minibatch (OXID)
    Serial Number: P00000315002
    190993

    Kokusai  

    Quixace Ultimate 

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    in LPCVD Furnaces

    1 F*N* Malta, New York
    Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

    Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

    Low Temp Steam Anneal - for SOD Cure

    S/N: T2DD6-18711

    190748

    Kokusai  

    DJ-1236VN-DF 

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    in LPCVD Furnaces

    1 N* Malta, New York
    Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN
    Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

    S/N T2DC6-16590

    ALD TiN

    Tool is New In Box, with New Quartz.  Never installed.
    190749

    Kokusai  

    DJ-1236VN-DF 

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    in LPCVD Furnaces

    1 N* Malta, New York
    Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN
    Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

    S/N: T2DC6-16595

    ALD TiN
    180506

    Kokusai  

    DJ-1236VN-DF 

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    in LPCVD Furnaces

    1 F* Dresden, SN
    Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
    Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
    TiCl4, NH3 - Process for TiN - Prior Use

    Cartridge Heater - D4EX22250, RHC2 Heater
    Number of control zone, 5 zones
    Heater element material - KANTHAL APM
    Maximum heating temperature range - 1050 degC (in Furnace)
    Flat zone length - 800mm (±2.0 degC at 800 degC)
    Main Controller(OU) - D4EX38403(KDSC-2007CONT), Made by HKDE
    Core2Duo 2.16GHz, 2.0GB, 80GB (RAID1), 100BASE-TX 3Ch, USB2.0
    Main Operation Unit - TM150-HKT05 
    Sub Operation Unit - D4EX40577
    Bottle Heater (For Ta Source) - E-0456-17, Tokyo Gikken
    Bottle Heater (For Ta Source) - E-0456-17, Made by Tokyo Gikken
    Bubbling UNIT (For Ti Source) - D4EX31240, Made by Schumacher
    Bottle (For Ti Source) - BK1200URK, Made by Schumacher
    N2 Purge Load Lock System
    O2 Monitor / Detector - SH-305(RX-501052), Made by ENEGY SUPPORT
    FOUP Opener N2 Purge SYSTEM - Made by HITACHI KOKUSAI

    S/N: T2DC6-15901
    190750

    Kokusai  

    DD-1223VN 

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    in LPCVD Furnaces

    1 F*N* Malta, New York
    Kokusai Quixace, 300mm, DD-1223VN, ALD-TiN
    Kokusai Quixace, 300mm, DD-1223VN

    ALD-TiN 

    S/N T2DC6-16441
    186717

    Kokusai  

    DJ-853V 

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    in LPCVD Furnaces

    1 F* Singapore,
    Kokusai, 200mm, DJ-853V, LPCVD SiN S
    Kokusai, 200mm, DJ-853V, LPCVD SiN 

    188431

    Aviza Technology Ltd  

    AVP 8000 AP 

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    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace
    SVG, AVP 8000 AP, 200mm Vertical Furnace
    Cu Anneal




    S/N 4250
    188435

    Aviza Technology Ltd  

    AVP 8000 AP 

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    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    Padox/Sacri-Ox

    S/N: 4318
    189077

    Silicon Valley Group  

    AVP 8000 AP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace
    SVG, AVP 8000 AP, 200mm Vertical Furnace

    Padox/Sacri-Ox

    Bagged & Skidded in Warehouse


    191257

    Silicon Valley Group  

    AVP 8000, AP, Forming Gas Anneal 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace, Forming Gas Anneal
    SVG, AVP 8000 AP, 200mm Vertical Furnace, Forming Gas Anneal

    S/N: 4437
    191913

    Silicon Valley Group  

    AVP 8000 AP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Singapore,
    SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

    SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

    Bagged & Skidded in Warehouse


    189132

    Silicon Valley Group  

    AVP 8000 LP 

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    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-Pad/SPCR (Gen Nit)

    Bagged & Skidded in warehouse
    188436

    Aviza Technology Ltd  

    AVP 8000 AP 

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    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    Padox/Sacri-Ox

    S/N: 4404
    188481

    Aviza Technology Ltd  

    AVP 8000 LP 

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    in LPCVD Furnaces

    1 F* Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Poly (Plain Poly)

    S/N: 4302
    188482

    Aviza Technology Ltd  

    AVP 8000 LP 

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    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Plain Poly

    S/N: A10092
    188483

    Aviza Technology Ltd  

    AVP 8000 LP 

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    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD TEOS

    S/N: 4436
    188432

    Aviza Technology Ltd  

    AVP 8000 LP 

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    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-Pad/SPCR (Gen Nit)


    S/N: 4359

    188433

    Aviza Technology Ltd  

    AVP 8000 LP 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-Pad/SPCR (Gen Nit)


    S/N: 4434

     

    188434

    Aviza Technology Ltd  

    AVP 8000 LP 

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    in LPCVD Furnaces

    1 F* Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-ONO

    S/N: A10078
    191270

    Silicon Valley Group  

    AVP 8000 LP, SiN 

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    in LPCVD Furnaces

    1 F*N* Singapore,
    SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD SiN
    SVG, AVP 8000 LP, 200mm Vertical Furnace

    LPCVD Nitride-Pad/SPCR (Gen Nit)

    S/N: 4321
    187658

    Tokyo Electron Ltd  

    Alpha 8 S 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride
    TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride

    S/N: 300009675379

    In the Fab in Singapore
    190746

    Tokyo Electron Ltd  

    IndyPlus 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 N* Malta, New York
    TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2
    TEL Indy +, Vertical Furnace, 300mm

    ALD-HfO2
    190747

    Tokyo Electron Ltd  

    IndyPlus 

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    1 N* Malta, New York
    TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2

    TEL Indy +, Vertical Furnace, 300mm

    ALD-HfO2

    137543

    TEL Corp.  

    TEL Trias TI/TiN-ALD for 12" / 300 mm 

    List all items of this typeBenchtop LPVCD Furnaces

    in LPCVD Furnaces

    1 F* Regensburg, BY
    TEL Trias TI/TiN-ALD
    TEL Trias TI/TiN-ALD
    Equipment Code: CVD314-01


    TEL Trias TI/TiN-ALD
    Serial Number: C10503
    189682

    Tokyo Electron Ltd  

    Alpha 8S 

    List all items of this typeVertical LPCVD Furnaces

    in LPCVD Furnaces

    1 Singapore,
    TEL, Aplha 8 S, 200mm, Vertical Furnace, Doped Poly
    TEL, Aplha 8 S, 200mm, Vertical Furnace,  Doped Poly

    S/N: 300009645188


    *   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under LPCVD Tools:
    ASM, Aviza Technology Ltd., Kokusai, Silicon Valley Group, TEL Corp., Tokyo Electronics Limited