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LPCVD Tools


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 Offered (box) or Wanted (coins)  Item ID  Photo Short Description Product Type / Details # Price Notes Location
Make Model
  $  
183418
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

183417
ASM  

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2560

183169
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, NY
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

2011 Vintage
183170
ASM  

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2540

2011 Vintage

 

Tool ID: FVX2541

 
137544
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Celsior mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Aviza Celsior mainframe:
Aviza Celsior mainframe



Aviza Celsior mainframe
Equipment Code: CVD304-04

LOCATION: Dresden
137540
Aviza Technology Ltd  

Aviza Technology Ltd  

Aviza Pantheon Mainframe for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Aviza Pantheon Mainframe:
Aviza Pantheon Mainframe
Equipment Code: CVD304-03


Aviza Pantheon Mainframe with 3 chambers
Serial Number: OX0412-005
137566
Tokyo Electron Ltd  

Tokyo Electron Ltd  

OfenTel Minibatch (NITRID) for 12" / 300 mm 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
Furnace TEL Minibatch (NITRID):
OfenTel Minibatch (NITRID)
Equipment Code: OFE361-01

TEL Formula Minibatch furnace for Nitride, 4


OfenTel Minibatch (NITRID)
Serial Number: P00000315001
137567
Tokyo Electron Ltd  

Tokyo Electron Ltd  

OfenTel Minibatch (OXID) for 12" / 300 mm 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
FurnaceTel Minibatch (OXID):
OfenTel Minibatch (OXID)
Equipment Code: OFE361-02

TEL Formula Minibatch furnace for Oxide


OfenTel Minibatch (OXID)
Serial Number: P00000315002
190993
Kokusai  

Kokusai  

Quixace Ultimate 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF:

Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF

Low Temp Steam Anneal - for SOD Cure

S/N: T2DD6-18711

190748
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN:
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N T2DC6-16590

ALD TiN

Tool is New In Box, with New Quartz.  Never installed.
190749
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
Kokusai Quixace Ultimate, 300mm, DJ-1236VN-DF, ALD-TiN:
Kokusai Quixace Ultimate, 300mm,  DJ-1236VN-DF

S/N: T2DC6-16595

ALD TiN
180506
Kokusai  

Kokusai  

DJ-1236VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Dresden, SN
Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF:
Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
TiCl4, NH3 - Process for TiN - Prior Use

Cartridge Heater - D4EX22250, RHC2 Heater
Number of control zone, 5 zones
Heater element material - KANTHAL APM
Maximum heating temperature range - 1050 degC (in Furnace)
Flat zone length - 800mm (±2.0 degC at 800 degC)
Main Controller(OU) - D4EX38403(KDSC-2007CONT), Made by HKDE
Core2Duo 2.16GHz, 2.0GB, 80GB (RAID1), 100BASE-TX 3Ch, USB2.0
Main Operation Unit - TM150-HKT05 
Sub Operation Unit - D4EX40577
Bottle Heater (For Ta Source) - E-0456-17, Tokyo Gikken
Bottle Heater (For Ta Source) - E-0456-17, Made by Tokyo Gikken
Bubbling UNIT (For Ti Source) - D4EX31240, Made by Schumacher
Bottle (For Ti Source) - BK1200URK, Made by Schumacher
N2 Purge Load Lock System
O2 Monitor / Detector - SH-305(RX-501052), Made by ENEGY SUPPORT
FOUP Opener N2 Purge SYSTEM - Made by HITACHI KOKUSAI

S/N: T2DC6-15901
194725
Kokusai  

Kokusai  

DD-1206V-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Taichung, Taichung City
Kokusai Quixace, 300mm, DD-1206V-DF:
Kokusai Quixace, 300mm, DD-1206V-DF

LP SiN 

S/N : T2DC6-13303

!!! MULTIPLE UNITS AVAILABLE !!!  Please inquire
195354
Kokusai  

Kokusai  

DD-1206V-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Taichung, Taichung City
Kokusai Quixace, 300mm, DD-1206V-DF:
Kokusai Quixace, 300mm, DD-1206V-DF

Pyro + TLC 


S/N: T2DC6-17017


!!! MULTIPLE UNITS AVAILABLE!!! Please inquire
195355
Kokusai  

Kokusai  

DD-1206VN-DF 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Taichung, Taichung City
Kokusai Quixace, 300mm, DD-1206VN-DF:
Kokusai Quixace, 300mm, DD-1206VN-DF


PYRO + TLC



S/N: T2DD6-16872

!!! MULTIPLE UNITS AVAILABLE!!!  Please inquire
190750
Kokusai  

Kokusai  

DD-1223VN 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Malta, New York
Kokusai Quixace, 300mm, DD-1223VN, ALD-TiN:
Kokusai Quixace, 300mm, DD-1223VN

ALD-TiN 

S/N T2DC6-16441
195356
Kokusai  

Kokusai  

DJ-1206VN-DM 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F*N* Singapore,
Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN:
Kokusai Quixace, 300mm, DJ-1206VN-DM, LPCVD SiN

S/N : T1DC6-13301

!!!Multiple Units Available!!!  Please inquire
186717
Kokusai  

Kokusai  

DJ-853V 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   F* Singapore,
Kokusai, 200mm, DJ-853V, LPCVD SiN S:
Kokusai, 200mm, DJ-853V, LPCVD SiN 

191258
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, AP, Forming Gas Anneal 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace:

SVG, AVP 8000 AP, 200mm Vertical Furnace

S/N: 4272

Cu Anneal (Single Boat)

191268
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, Gate Ox 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Singapore,
SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation:
SVG, AVP 8000 AP, 200mm Vertical Furnace, Gate Oxidation

Thermal Gate Oxideation furnace

S/N: 4252
191275
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 LP Poly 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD Poly:
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD Poly (Plain Poly)

S/N: 4257
191277
Silicon Valley Group  

Silicon Valley Group  

AVP 8000 LP TEOS 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace, LPCVD TEOS:
SVG, AVP 8000 LP, 200mm Vertical Furnace

LPCVD TEOS

S/N: 4425
191274
Silicon Valley Group  

Silicon Valley Group  

AVP 8000, AP, Oxidation 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Singapore,
SVG, AVP 8000 LP, 200mm Vertical Furnace, Oxidation:
SVG, AVP 8000 LP, 200mm Vertical Furnace, Oxidation

S/N: 4409


187658
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8 S 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride:
TEL Alpha 8 S, 200mm, Vertical Furnace, LPCVD Nitride

S/N: 300009675379

In the Fab in Singapore
189686
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
TEL Alpha 8 S, 200mm, Vertical Furnace, Polysilicon :
TEL Alpha 8 S, 200mm, Vertical Furnace, Polysilicon 

S/N: A00009815018

Bagged & Skidded in Warehouse.
178712
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy + 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Taichung, Taichung City
TEL Indy +, Vertical Furnace, 300mm:
TEL Indy +, Vertical Furnace, 300mm

LP ALD
194724
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy Plus 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Taichung, Taichung City
TEL Indy +, Vertical Furnace, 300mm:
TEL Indy +, Vertical Furnace, 300mm


190746
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2:
TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2
190747
Tokyo Electron Ltd  

Tokyo Electron Ltd  

IndyPlus 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Malta, New York
TEL Indy +, Vertical Furnace, 300mm, ALD-HfO2:

TEL Indy +, Vertical Furnace, 300mm

ALD-HfO2

178714
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Indy + 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Taichung, Taichung City
TEL Indy, Vertical Furnace, 300mm:
PSZ (Poly-Silazane) Cure Furnace, 300mm
Heater: FTP VOS-56-101P 4zone / RT-1100 (C) / with RCU
Process Condition: AP+Sub-AP
MAX Operating Temp: 900degC

137543
TEL Corp.  

TEL Corp.  

TEL Trias TI/TiN-ALD for 12" / 300 mm 

List all items of this typeBenchtop LPVCD Furnaces

in LPCVD Furnaces

1   F* Regensburg, BY
TEL Trias TI/TiN-ALD :
TEL Trias TI/TiN-ALD
Equipment Code: CVD314-01


TEL Trias TI/TiN-ALD
Serial Number: C10503
195347
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Taichung, Taichung City
TEL, Alpha 303i, 300mm Vertical Furnace, Low Temp:
TEL, Alpha 303i, 300mm Vertical Furnace, Low Temp

S/N: L00000615007

Known Parts Missing:

qty. 1 Carrier ARM cable line-XS235IO
qty. 1 Carrier ARM cable line-XS232IO
qty. 3 UPS battery, 12V 5.5Ah in series 3, TEL

195346
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Taichung, Taichung City
TEL, Alpha 303i, 300mm Vertical Furnace, LT SOD cure:
TEL, Alpha 303i, 300mm Vertical Furnace, LT SOD cure
195348
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 303i 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   N* Santa Clara, California
TEL, Alpha 303i, 300mm Vertical Furnace, P-Doped Poly:
TEL, Alpha 303i, 300mm Vertical Furnace, P-Doped Poly

S/N : L00000735083


189682
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S 

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
TEL, Aplha 8 S, 200mm, Vertical Furnace, Doped Poly:
TEL, Aplha 8 S, 200mm, Vertical Furnace,  Doped Poly

S/N: 300009645188
192952
Tokyo Electron Ltd  

Tokyo Electron Ltd  

Alpha 8S  

List all items of this typeVertical LPCVD Furnaces

in LPCVD Furnaces

1   Singapore,
TEL, Aplha 8 S, 200mm, Vertical Furnace, LPCVD Doped Poly:
TEL, Aplha 8 S, 200mm, Vertical Furnace, LPCVD Doped Poly

S/N : A00009835236


*   Vendor Role: Mfr is Manufacturer; Sup is Supplier/Distributor; OEM is Original Equipment Manufacturer

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under LPCVD Tools:
ASM, Aviza Technology Ltd., Kokusai, Silicon Valley Group, TEL Corp., Tokyo Electronics Limited