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NEXX SYSTEMS ECR PECVD RIE SYSTEM


NEXX SYSTEMS ECR PECVD RIE SYSTEM


Low Temperature CVD Using ECR Technology. Formerly PlasmaQuest Astex


Items from the following manufacturers are offered under PECVD Tools:
Applied Materials, Inc., Astex, Cline Innovations, Nexx Systems, Oxford Instruments, Plasma-Therm, Tokyo Electronics Limited