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Single Chamber PECVD Tools


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  • Item IDItem DescriptionSize RangeCass to CassLoadlock#PriceNotes Location
    MakeModelSet SizeLoadlock Y/N
    $
    184607 Astex AX5000, AX6000, AX6350 or similar1 F*Leominster, MA
    189843 Astex AX6500 "Clamshell" MPCVD1 F*N*Leominster, Massachusetts
    137483 Astex ECR-MOCVD-PECVD1 F*Leominster, MA
    187926 Cline Innovations Custom CVD Diamond System1 F*Leominster, MA
    11074 Nexx Systems Cirrus 300YES1 F*Scotia, NY
    181540 Oxford Instruments Plasmalab System 100YES1 F*Scotia, NY
    147470 Plasma-Therm 790 PECVD 11"1 F*Scotia, NY

    NOTE:
       photo available
       reference document attached
      F* if the item is specially featured
      N* if the item is newly added, and/or
      R* if the item's price is recently reduced.

    Items from the following manufacturers are offered under Single Chamber PECVD Tools:
    Astex, Cline Innovations, Nexx Systems, Oxford Instruments, Plasma-Therm