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Cluster PECVD Tools


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Item IDPhotoItem DescriptionSize RangeChambersProc Capablitis#PriceNotes Location
MakeModelSet Size
$
56326
Applied Materials P5000100 mm3Can be configured to your specifications1 F*Scotia, NY
23215
Applied Materials P5000 MARK II3TEOS Deposition, Oxide Etch1 F*Scotia, NY
30246
Plasma-Therm VLR 700 VLR-PM1-ICRB-PM100 mm1Nitride Depostion1 F*Scotia, NY
137546
Tokyo Electron Ltd TEL Trias TI/TiN-ALD for 12" / 300 mm300 mm41 F*Regensburg, BY

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  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.

Items from the following manufacturers are offered under Cluster PECVD Tools:
Applied Materials, Inc., Plasma-Therm, Tokyo Electronics Limited