|Number of Units
|Model ||AST-304 |
|Description ||Sputtering--Ion Etch |
|Vacuum System ||Cryo Pumped|
|Vacuum System ||CTI Cryogenics Cryotorr 8|
CTI Cryogenics 8200 compressor
Leybold D65B mechanical pump
|Load Lock Included ||No|
|Number of Cathodes ||Three|
|Target Size ||8 Inch |
|Quantity of DC Cathodes ||3|
|Substrate Heaters ||No|
|Residual Gas Analyzer ||No|
|DC Power Supply |
| Manufacturer ||CVC |
| Output Power ||3.00 kW DC|
|Accessories ||Ion Source|
Ion Tech Type B94AL Ion Source
Max. beam output: 10mA
Normal accelerating voltage: 1.0 - 4.5 kV
Max. accelerating voltage: 8kV
Max. electron current: 200mA
Max. power input: 800W continuous
Typical beam current: close to 100% neutrals
Commonwealth Scientific IBS power supply/controller.
|Other Information ||Chamber
25" diameter with (3) 2" conflat ports.|
(5) feed through holes in baseplate.
Manual throttle valve below baseplate.
(6) 7" diameter planetary stations are mounted on baseplate. Each flat substrate holder is located with 2 pins for ease of removal.
The planetary system may rotate up to 20 RPM with individual planets revolving at various speeds about their own axis.
The planetary system can be static with each planet rotating about its own axis.
A manual shutter provides a means of sputter cleaning, ion etching and selective sputtering.
Complete set of shielding included--not photographed.
|Power Requirements ||208 V
|Weight ||820 lb (372 kg)|