| (3)CVI Torrmaster TM500 Cryopumps
(2) Interchangeable substrate carousels with flipping option
(3) Telemark Model TT-10 Power Supply
(3) Telemark Model TT-10/15 Controller
(3) Telemark Model 271 4 Pocket Electron Beam Gun
(2) Granville-Phillips Model 316 Vacuum Gauge controller
(1) Granville-Phillips Model 370 Stabil-Ion Controller
(2) DynaVac Ion Source Controllers Model 8542
(2) Advanced Energy MDX 5K Magnetron Drives Model 3152011-000AC
(3) Lakeshore Cryotronics Temperature controllers Model 818
(1) MKS Type 250 Controller
(3) Inficon Deposition Controllers IC/5, Model 760-500-G2
(3) Dual Crystal Sensors
(1) Polycold Model PFC-550-HC
(1) Polycold Model PFC-110-ST
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