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Deal directly with Owner:  Cline Innovations LLC of Leominster, MA
Item ID: 109694

Offered1 Offered at Best Price

12-inch (300mm) HFCVD System for CVD Diamond & Related Materials

  • Hot Filament CVD system engineered for diamond deposition on a 12 inch (~300mm) rotary platen.
  • Design offers excellent potential for diamond, CNTs & related nanomaterials processing for both R&D and/or production.

    This equipment was engineered and used by an industrial entity for commercial CVD production using a hydrogen-based process. 2-chamber system design includes loading chamber and HFCVD hot zone separated by large gate valve. This design enables continuous operation of filaments for many days without shutdown. Equipment employs a 4-zone filament array with independent controls for each zone. Rotary stage maximizes deposition uniformity. Large HFCVD hot zone and push rod design enable substrate-to-filament distance control. Refractory metal filaments can operate at >2000C and enable thermal decomposition of H2 and hydrocarbons into activated species. Specialty, water-cooled MDC chambers maintain low temperature chamber wall while substrate is heated to elevated temperatures via atomic hydrogen recombination and radiational heating.

    Deposition over >12 inch diameter or coating on 3-D shapes should be viable with process and fixture development.

    Images of a typical HFCVD system installation are attached.
12-inch (300mm) HFCVD System for CVD Diamond & Related Materials
  Click to see additional image(s)... other images

Location: Sterling, MA
Unit Price Unstated
Number of Units 1
Description 12-inch (300mm) HFCVD System
Accessories Documentation includes selected hardcopy and electronic CAD drawings.
Other Information Cline Innovations offers experience with activated CVD of carbon based materials dating back to 1989 including roles in academia and industry.

Please don't hesitate to contact Cline Innovations to confidentially discuss your research or industrial application interests.

US Export Controls may apply.
Power Requirements      3 Phase

OFFERED BY: (click name below to visit its website directly)

Cline Innovations LLC
Leominster , MA
+1 (978) 422-2901

Deal directly with Owner:  Cline Innovations LLC of Leominster, MA