Semiconductor Manufacturing Equipment: Used, Surplus, Refurbished Vacuum Pumps and Vacuum Equipment For Sale, Auctioned and Wanted

	Item ID	Photo	Short Description	Product Type / Details	#	Price	Location
Make	Model
		$
	190633	Absopulse Electronic	Absopulse Electronic	HVI 2K-750/24-3U3-S5037	Power Supplies - Other in PVD Power Supplies ABSOPULSE ELECTRONICS DC TO DC CONVERTER 2000 WATT: DC to DC Converter New Surplus -- Never Used	2		F*	Scotia, New York

	190548	Absopulse Electronic	Absopulse Electronic	CTP5K-750/3P480-3U7-S5037	Power Supplies - Other in PVD Power Supplies ABSOPULSE ELECTRONICS SINE WAVE INVERTER 5000VA : New Surplus -- Never Used	1			Scotia, New York

	190552	Absopulse Electronic	Absopulse Electronic	CTP 9K-750 3P480-3X3U4 3U7 19-S5344	Power Supplies - Other in PVD Power Supplies ABSOPULSE ELECTRONICS THREE PHASE INVERTER 9kVA: Three Phase Inverter New Surplus -- Never Used	2		F*	Scotia, New York

	147789	Acopian OEM*	Acopian OEM*	B2G170	Power Supplies - Other in PVD Power Supplies Acopian B2G170 Regulated Power Supply: *Acopian B2G170 Regulated Power Supply* Regulated Power Supply	1			Plano, TX

	104062	Acopian OEM*	Acopian OEM*	D15-10	Power Supplies - Other in PVD Power Supplies Acopian Part Number D15-10: Supply 15V 100MA Power	1			Hudson, NY

	104063	Acopian OEM*	Acopian OEM*	D15-10A	Power Supplies - Other in PVD Power Supplies Acopian Part Number D15-10A: Supply 15V 100MA Power	1		F*	Hudson, NY

	104064	Acopian OEM*	Acopian OEM*	D15-35	Power Supplies - Other in PVD Power Supplies Acopian Part Number D15-35: Supply 15V 100MA Power	1			Hudson, NY

	115716	Acopian Mfr*	Acopian Mfr*	DB15-35	Power Supplies - Other in PVD Power Supplies Acopian Part Number DB15-35: Power Supply	1			Hudson, NY

	49690	Advanced Energy	Advanced Energy	ATX-600	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY IMPEDANCE MATCHING NETWORK CONTROLLER: *Controller for Impedance Matching Network* Controller for the Advanced Energy Impedance Matching Network. Matching network is not available.	1		F*	Scotia, New York

	140340	Advanced Energy	Advanced Energy	Apex 3013	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ: *Radio Frequency Generator* The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.	2		F*	Scotia, New York

	139488	Advanced Energy	Advanced Energy	PEII-10K	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ: Radio Frequency Generator Representative photo	10		F*	Scotia, New York

	208186	Advanced Energy	Advanced Energy	PEII-10K	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ: *Representative photo*	1		F*	Scotia, New York

	175885	Advanced Energy	Advanced Energy	3152522-001B / RAS Split Inductor	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RAS SPLIT INDUCTOR: The RAS Split Inductor is designed for use with Advanced Energy PE or PEII 10 kW (or lower) power supply systems	1		F*	Scotia, New York

	225628	Advanced Energy	Advanced Energy	PE 10K	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY REMOTE MINI-PANEL : PE 10K Remote Mini-Panel	1			Scotia, New York

	1007	Advanced Energy	Advanced Energy	LF5	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RF GENERATOR POWER SUPPLY : *RF Generator w/Matching Network* Formerly RF Power Products	3			Scotia, New York

	190763	Advanced Energy	Advanced Energy	RF10S	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1000 WATT 13.56 MHZ: *Radio Frequency (RF) Generator* Power Supply Part No: 3150014-000 G4 SE	1			Scotia, New York

	207153	Advanced Energy	Advanced Energy	Apex 1500/13	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1500 W 13.56 HZ: Radio Frequency Generator	1		F*	Scotia, New York

	42967	Advanced Energy	Advanced Energy	Apex 3513	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RF GENERATOR POWER SUPPLY 3.5KW: *Radio Frequency Generator* The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.	1		F*	Scotia, New York

	3464	Advanced Energy	Advanced Energy	PDX9002V	Radio Frequency (RF) Generators in PVD Power Supplies ADVANCED ENERGY RF PLASMA GENERATOR POWER SUPPLY 900W, 350 KHZ: *RF Plasma Generator*	2	2,600.70	F*	Scotia, New York

	4397	Advanced Energy	Advanced Energy	3500	Ion Beam Drives in PVD Power Supplies ADVANCED ENERGY/VEECO ION BEAM DRIVE: Ion Beam Drive for Veeco 10" Source Item sold AS IS, inquire on price	2			Scotia, NY

	84596	Agilent	Agilent	E3614A	DC Power Supplies in PVD Power Supplies AGILENT DC POWER SUPPLY: *Direct Current Power Supply*	1	440.12	F*	Scotia, New York

	80199	Airco Temescal	Airco Temescal	VES 2550	Electron Beam Evaporators in Deposition Equipment AIRCO TEMESCAL ELECTRON BEAM DEPOSITION SYSTEM, 4 POCKET: *E-Beam Deposition System*	1		F*	Scotia, New York

	1827	Airco Temescal	Airco Temescal	SFIH2701	Electron Beam Evaporators in Deposition Equipment AIRCO TEMESCAL SINGLE CRUCIBLE ELECTRON BEAM SOURCE: *Single Crucible Electron Beam Source*	1	3,751.00	F*	Scotia, New York

	219773	Applied Materials	Applied Materials	AKT 1600	Cluster Sputtering Tools in Single Wafer Sputtering Tools AKT APPLIED MATERIALS SPUTTERING TOOL: Cluster Sputtering Tool	1		F*	Scotia, New York

	198656	Alpha Scientific Ele	Alpha Scientific Ele	Magnet Power Supply 315 kW	DC Power Supplies in PVD Power Supplies	1			Scotia, New York

	245275	Applied Materials	Applied Materials	EPI5	Epitaxial Cluster Tools in Epitaxial Reactors AMAT EPI CENTURA HTF (EPI5): Software Ver: B6.30 CB1 Amps: 300A SBC Type: V452 Flow Point Model: Nano Valve Gas Panel Type: Configurable Wafer Size: 200mm (with conversion kit 150mm is possible) M-Monitor: CRT 3 Chambers ATM EPI With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC) HDD was upgraded to RAID System Tool called "EPI5"	1			Villach, Carinthia

	218746	Applied Materials	Applied Materials	P5000	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment Amat P5000 CVD Tool: P500048 8 inch tool with 4 CVD chambers. Tool still in Production until (Planned until 3.23)	1			Villach, Carinthia

	57073	Applied Materials OEM*	Applied Materials OEM*	1140-01137	DC Power Supplies in PVD Power Supplies AMAT Part Number 1140-01137: *DC Power Supplies in Power Supplies* POWER SUPPLY, 5VDC 30AMP	1			Hudson, NY

	57074	Applied Materials OEM*	Applied Materials OEM*	1140-01140	DC Power Supplies in PVD Power Supplies AMAT Part Number 1140-01140: *DC Power Supplies in Power Supplies* POWER SUPPLY, 24VDC 25AMP	1			Hudson, NY

	245288	AMAT	AMAT	P5000	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment AMAT, P5000, 200mm, S/N 4862: AMAT, P5000, 200mm, S/N 4862	1			Singapore

	246605	Applied Materials	Applied Materials	Ultima CENTURA DCVD	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment AMAT, Ultima CENTURA DCVD, 200mm, S/N 302959: AMAT, Ultima CENTURA DCVD, 200mm, S/N 302959 2 chms.	1			Singapore

	228193	AMAT AKT	AMAT AKT	AKT 15 K	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment APPLIED MATERIALS AKT GEN 5 PECVD CHAMBER: Chambers are unused and were never commissioned. Susceptor, gas shower and other chamber kitting not included.	5		F*	Scotia, New York

	228194	AMAT AKT	AMAT AKT	AKT 25 K	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment APPLIED MATERIALS AKT GEN 6 PECVD CHAMBER: Chambers are unused and were never commissioned. Susceptor, gas shower and other chamber kitting are not installed.	5		F*	Scotia, New York

	229902	AMAT AKT	AMAT AKT	0690-01681	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment APPLIED MATERIALS AMAT 0690-01681 CLAMP FLG SGL-CLAW NW160,200: CLAMP FLG SGL-CLAW NW160,200 Item is in new condition sealed in its original packing. Browse our large inventory of Applied Materials AKT PECVD GEN 5 & GEN 6 Parts. Including 25K/15K Process Chambers, Susceptors, Chamber Liners, Kitting and much more. Check out our full list here: Applied Materials AKT PECVD New/Used Surplus Parts List	1			Scotia, New York

	229925	APPLIED MATERIALS AMAT 0690-01681 CLAMP FLG SGL-CLAW NW160,200	APPLIED MATERIALS AMAT 0690-01681 CLAMP FLG SGL-CLAW NW160,200	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment APPLIED MATERIALS AMAT 0690-01681 CLAMP FLG SGL-CLAW NW160,200: CLAMP FLG SGL-CLAW NW160,200 Item is in new condition sealed in its original packing. Browse our large inventory of Applied Materials AKT PECVD GEN 5 & GEN 6 Parts. Including 25K/15K Process Chambers, Susceptors, Chamber Liners, Kitting and much more. Check out our full list here: Applied Materials AKT PECVD New/Used Surplus Parts List	1			Scotia, New York

	228262	AMAT AKT	AMAT AKT	N/A	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment APPLIED MATERIALS AMAT AKT FIXTURE DIFFUSER LIFTING 25KAXI: FIXTURE DIFFUSER LIFTING 25KAXI New surplus - item is brand new, in OEM crate. Photo of crates is a representative photo.	2		F*	Scotia, New York

	228247	AMAT AKT	AMAT AKT	0244-74553 REV.2	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment APPLIED MATERIALS AMAT AKT GEN 5 15K SUSCEPTOR: KIT SUSC FSW 1/4 CEN GTP SS 1200X1600 15 New surplus - item is brand new, in OEM crate. Photo of crates is a representative photo.	2			Scotia, New York

	228260	AMAT AKT	AMAT AKT	0244-74553	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment APPLIED MATERIALS AMAT AKT GEN 5 15K SUSCEPTOR: KIT SUSC FSW 1/4 CEN GTP SS 1200X1600 15 New surplus - item is brand new, in OEM crate. Photo of crates is a representative photo.	2		F*	Scotia, New York

	228261	AMAT AKT	AMAT AKT	0244-74554 REV.3	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment APPLIED MATERIALS AMAT AKT GEN 6 25K SUSCEPTOR: KIT SUSC FSW 1500X1850 W/O BSHING New surplus - item is brand new, in OEM crate. Photo of crates is a representative photo.	2			Scotia, New York

	225959	Applied Materials	Applied Materials		Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment	1			Scotia, New York

	225956	Astex	Astex	2.5kW	Radio Frequency (RF) Generators in PVD Power Supplies Astex 2.5kW switching microwave generator set: The complete tested, refurbished 2.5kw microwave generator set includes: 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality. Water-cooled 2.5kW magnetron head with variable output. Water-cooled 3-way circulator. All interconnecting cables for the above components. Operational and ready to ship with relatively short lead-time. Limited warranty can be considered depending on the application.	1			Leominster, Massachusetts

	213180	Astex	Astex	AX2518	Radio Frequency (RF) Generators in PVD Power Supplies ASTeX AX2518 SmartPower Microwave Power Supply: Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head. Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods. Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type. Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered! Goods can be sold with a limited warranty.	2			Leominster, Massachusetts

	184607	Astex	Astex	AX5000, AX6000, AX6350 or similar	Single Chamber PECVD Tools in Production Tools Astex AX5000 Microwave Plasma Diamond Growth System: Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production. System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components. Alternatively, a kit of core components can be offered for skilled users interested in building their own system. This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions. 1.5kW to 5kW microwave power input. 3 stage options: Cooled, Heated, or Thermally Floating. Integration with computer controls is strongly recommended. Chamber designs vary by vintage, but can be confirmed at the time of quotation. Please note that the chamber shown in the attached image is a new chamber. The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.	1		F*	Leominster, Massachusetts

	189843	Astex	Astex	AX6500 "Clamshell" MPCVD	Single Chamber PECVD Tools in Production Tools Astex AX6500 Bottom-launch Diamond Growth System: This in-stock equipment is offered for domestic sale within the USA only. Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex. Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD). System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety: Chamber cleaning, Computer control updates, Higher throughput water cooling subsystem, Replacement of selected o-ring components with metal seals, and Enhanced process control/monitoring devices. The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input. Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing. Photo Note: System photo shown include a similar quality, similar vintage system sold in the past. Actual photos or inspection available to qualified customers only.	1			Leominster, Massachusetts

	168802	Astex	Astex	HS	Radio Frequency (RF) Generators in PVD Power Supplies Astex HS Air-Cooled Magnetron Head: For use with compatible Astex switching microwave power supplies.	1			Leominster, Massachusetts

	168804	Astex	Astex	HS-1000, HS1000	Radio Frequency (RF) Generators in PVD Power Supplies Astex HS-1000 Air-Cooled Magnetron Head: For use with compatible Astex switching microwave power supplies.	1			Leominster, MA

	168803	Astex	Astex	HS-1500, HS1500	Radio Frequency (RF) Generators in PVD Power Supplies Astex HS-1500 Air-Cooled Magnetron Head: For use with compatible Astex switching microwave power supplies.	1			Leominster, MA

	137483	Astex	Astex	ECR-MOCVD-PECVD	Single Chamber PECVD Tools in Production Tools ASTeX Large Volume Plasma Processing System (ECR-PECVD-MPCVD-MOCVD): High density plasma system activated by ECR-enhanced, 2.45GHz microwave input offers PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures. Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating. Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching. This is a flexible R&D or semi-production system that was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with two ECR magnets.	1			Leominster, Massachusetts

	206579	Astex	Astex	SXRHA	Radio Frequency (RF) Generators in PVD Power Supplies ASTEX MAGNETRON HEAD: Magnetron Head	2			Scotia, New York

	242019	ATV Technologie GmbH	ATV Technologie GmbH	PEO 602	Horizontal LPCVD Furnaces in LPCVD Furnaces ATV PEO 602 tube furnace: This furnace can handle wafers up to 150mm Configuration: N2 - 1500 l/min N2 - 660 l/min Forming Gas 660l/min Temperature Control 0°C – up to 500°C max. Free Ramping (up to 99 steps max., one step up to 99,99 °C max.) Stainless Steel Calotte 0 – 5kg	1			Warstein, North Rhine-Westphalia

	242018	ATV Technologie GmbH	ATV Technologie GmbH	PEO 603	Horizontal LPCVD Furnaces in LPCVD Furnaces ATV PEO 603 tube furnace : This furnace can handle wafers up to 150mm Configuration: N2 - 1500 l/min N2 - 660 l/min Forming Gas 660l/min Temperature Control 0°C – up to 500°C max. Free Ramping (up to 99 steps max., one step up to 99,99 °C max.) Stainless Steel Calotte 0 – 5kg	1			Warstein, North Rhine-Westphalia

	242850	Balzers	Balzers	BAK760	Electron Beam Evaporators in Deposition Equipment BAK760 PC101: evaporator Vacuum chamber: BAK 760 with accessories (vaccum pump etc.) for the processing of semiconductor devices (Diode, Thyristor) If there is a seriously buying interest, the technical specifications could be send	1			Warstein, North Rhine-Westphalia

	427	Balzers	Balzers	RFS 302	Radio Frequency (RF) Generators in PVD Power Supplies BALZERS RF POWER SUPPLY: *RF Power Supply*	1			Scotia, New York

	115714	Bruce (BTI) OEM*	Bruce (BTI) OEM*	8013469	Power Supplies - Other in PVD Power Supplies Bruce (BTI) Part Number 8013469: Power Supply +5 VDC 40W	2			Hudson, NY

	115715	Bruce (BTI) OEM*	Bruce (BTI) OEM*	8013470	Power Supplies - Other in PVD Power Supplies Bruce (BTI) Part Number 8013470: Power Supply +-15 VDC 40W	2			Hudson, NY

	57077	Bruce (BTI) OEM*	Bruce (BTI) OEM*	8196115	DC Power Supplies in PVD Power Supplies Bruce (BTI) Part Number 8196115: *DC Power Supplies in Power Supplies* Supply 12 VDC Power (SWE30-12F)	2			Hudson, NY

	43474	Bruker	Bruker	B-MN65/260	DC Power Supplies in PVD Power Supplies BRUKER DC POWER SUPPLY 65V, 260A: *Direct Current Power Supply*	1			Scotia, New York

	98056	Carbone	Carbone	G-III	Epitaxial Cluster Tools in Epitaxial Reactors CARBONE SILICON CARBIDE 200mm DISC SUSCEPTOR: *Silicon Carbide 200 mm Disc Susceptor* Carbone of America Part number 017893-001	5		F*	Scotia, New York

	50821	CHA Industries	CHA Industries	SEC-600-RAP	Resistance Evaporators in Deposition Equipment CHA FILAMENT EVAPORATOR: *Filament Evaporator--Cryo Pumped*	1		F*	Scotia, New York

	22276	CHA Industries	CHA Industries	SSC 1000	Horizontal Sputterers in Batch Sputtering Tools CHA INDUSTRIES SPUTTERING SYSTEM: *Sputtering System*	1		F*	Scotia, New York

	147905	CHA Industries	CHA Industries	SEC-1000-RAP	Electron Beam Evaporators in Deposition Equipment CHA SEC 1000 RAP ELECTRON BEAM EVAPORATOR: Six Pocket Ebeam Gun, (2)Resistance Sources, 6kW Heater Array, 25.5" Bell Jar, Cryo Pumped The CHA SEC-1000-RAP high-vacuum EBeam deposition system designed for use in production and research environments.	1		F*	Scotia, New York

	43020	Comdel	Comdel	CPS-5000/13.56	Radio Frequency (RF) Generators in PVD Power Supplies COMDEL RADIO FREQUENCY GENERATOR POWER SUPPLY: *Radio Frequency Generator*	1	9,502.55		Scotia, New York

	150393	Condor OEM*	Condor OEM*	CP1354	DC Power Supplies in PVD Power Supplies Condor CP1354 DC Power Supply: *Condor CP1354 DC Power Supply* DC Power Supply	2			Plano, TX

	151330	Condor OEM*	Condor OEM*	CP1573	DC Power Supplies in PVD Power Supplies CONDOR CP1573: *DC Power Supply*	1			Plano, TX

	129842	Condor Mfr*	Condor Mfr*	CP1417	DC Power Supplies in PVD Power Supplies Condor VDC Power Supply CP1417: *Condor VDC Power Supply CP1417*	18			Plano, TX

	42889	Copley Controls Corp	Copley Controls Corp	234	DC Power Supplies in PVD Power Supplies COPLEY CONTROLS CORP. DC HIGH POWER AMPLIFIER: *DC High Power Amplifier*	14			Scotia, New York

	98564	CPI	CPI	VPW2870W6-S	DC Power Supplies in PVD Power Supplies CPI DC SPUTTERING POWER SUPPLY: *Multi-Range DC Sputtering Power Supply* Novellus P/N: G1900219000	1			Scotia, New York

	231089	Daihen	Daihen	FGA-50B, DMU-01G	Radio Frequency (RF) Generators in PVD Power Supplies DAIHEN AMAT Water Cooled RF Generator 5000W 40.68MHz 50/60Hz: RF Generator New Surplus Applied Materials P/N 0191-71542	2			Scotia, New York

	230846	Daihen	Daihen	RGA-50J3, DMU-01G	Radio Frequency (RF) Generators in PVD Power Supplies DAIHEN WATER COOLED RF GENERATOR 5000W 13.56MHZ: RF Generator New Surplus	12			Scotia, New York

	147375	Dainippon Screen OEM*	Dainippon Screen OEM*	SSN-629-3	Power Supplies - Other in PVD Power Supplies Dainippon/DNS SSN-629-3 Power Supply: *Dainippon/DNS SSN-629-3 Power Supply* Power Supply	1			Plano, TX

	140005	Diversen OEM*	Diversen OEM*	QP2N1DF	Power Supplies - Other in PVD Power Supplies Diversen, QP2N1DF, Power Supply: *Diversen, QP2N1DF, Power Supply*	2			Plano, TX

	207176	Dockweiler Chemicals	Dockweiler Chemicals	8000	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment DOCKWEILER CHEMICALS HEAT EXCHANGER FOR BUBBLERS: Bubbler Heat Exchanger	1			Scotia, New York

	207177	Dockweiler Chemicals	Dockweiler Chemicals	20000	Chemical Vapor Deposition Equipment - Other in Chemical Vapor Deposition Equipment DOCKWEILER CHEMICALS HEAT EXCHANGER FOR BUBBLERS: Bubbler Heat Exchanger	1			Scotia, New York

	223580	Advanced Energy	Advanced Energy	Cesar 4020	Radio Frequency (RF) Generators in PVD Power Supplies DRESSLER ADVANCED ENERGY 2000W 40.68 MHz RF GENERATOR: RF Generator	1			Scotia, New York

	104065	EA Elektro Automatik OEM*	EA Elektro Automatik OEM*	EA-PSMPS 812-05 R	Power Supplies - Other in PVD Power Supplies EA Elektro Automatik Part Number EA-PSMPS 812-05 R: Power Supply 230V	3			Hudson, NY

	120995	Electronic Measuremt	Electronic Measuremt	EMS 7.5-130-2-D	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENT DC POWER SUPPLY 7.5 V, 130 A: *DC Power Supply*	1	875.23		Scotia, New York

	3703	Electronic Measuremt	Electronic Measuremt	EMS 300-16-2-D LB-10T-1401	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENT INC. DC POWER SUPPLY: *DC Power Supply*	8	2,300.62		Scotia, New York

	241957	Electronic Measuremt	Electronic Measuremt	EMS 300-16-2-D	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENT INC. DC POWER SUPPLY 300V 16A: *DC Power Supply*	1	2,500.67		Scotia, New York

	217403	Electronic Measuremt	Electronic Measuremt	EMS 10-250-2-D-0209F	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS DC POWER SUPPLY, 10V, 250 A: DC Power Supply Manufactured for Varian NB: These power supplies have Varian branding on them and there are three color variants available/shown. If color matters please inquire about availability.	25	1,550.42	F*	Scotia, New York

	217402	Electronic Measuremt	Electronic Measuremt	EMS 120-40	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS DC POWER SUPPLY, 120V, 40A: DC Power Supply Manufactured for Varian	20	1,850.50		Schenectady, New York

	217401	Electronic Measuremt	Electronic Measuremt	EMS 250-20-2D-0209E	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS DC POWER SUPPLY, 250V, 20A: DC Power Supply Manufactured for Varian NB: These power supplies have Varian branding on them and there are three color variants available/shown. If color matters please inquire about availability.	23	1,850.50	F*	Scotia, New York

	241956	Electronic Measuremt	Electronic Measuremt	ESS 130-115-2-D	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC DC POWER SUPPLY 130V, 115A: *DC Power Supply* Electronic Measurements Inc. has been acquired by TDK-Lambdas America Inc.	1		F*	Scotia, New York

	4586	Electronic Measuremt	Electronic Measuremt	EMS 13-150	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC DC POWER SUPPLY 13V, 150A: *DC Power Supply* Electronic Measurements Inc. has been acquired by TDK-Lambdas America Inc.	1	1,550.42	F*	Scotia, New York

	242597	Electronic Measuremt	Electronic Measuremt	EMS 150-7-2-D	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC DC POWER SUPPLY 150V, 7A: *DC Power Supply* Electronic Measurements Inc. has been acquired by TDK-Lambdas America Inc.	2			Scotia, New York

	241955	Electronic Measuremt	Electronic Measuremt	EMS 15-333-2-D	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC DC POWER SUPPLY 15V, 333A: *DC Power Supply* Electronic Measurements Inc. has been acquired by TDK-Lambdas America Inc.	5	1,850.50		Scotia, New York

	34864	Electronic Measuremt	Electronic Measuremt	EMS 13-200-2-D-1520	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DC POWER SUPPLY: *Direct Current Power Supply*	19	1,250.33	F*	Scotia, New York

	4584	Electronic Measuremt	Electronic Measuremt	TCR7.5T300	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DC POWER SUPPLY: *DC Power Supply*	3	1,780.48		Scotia, New York

	151705	Electronic Measuremt	Electronic Measuremt	TCR 250T20	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DC POWER SUPPLY : *Direct Current Programmable Power Supply*	1	1,850.50		Scotia, New York

	151789	Electronic Measuremt	Electronic Measuremt	TCR 50T50	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DC POWER SUPPLY : *Direct Current Programmable Power Supply*	1	2,250.60		Scotia, New York

	5122	Electronic Measuremt	Electronic Measuremt	EMS 20-125	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DC POWER SUPPLY 20 V, 125 A: Direct Current Power Supply Faceplate may be blue or black	7			Scotia, New York

	102208	Electronic Measuremt	Electronic Measuremt	TCR 20T250	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DC POWER SUPPLY 20V, 250A: *Direct Current Power Supply*	1	1,100.29		Scotia, New York

	140651	Electronic Measuremt	Electronic Measuremt	EMS 7.5-130-1-D	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DC POWER SUPPLY 7.5 V, 130 A: *DC Power Supply*	1	875.23		Scotia, New York

	4582	Electronic Measuremt	Electronic Measuremt	EMS 7.5-600	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DC POWER SUPPLY 7.5V, 600A: Direct Current Power Supply Face plate may either be Blue or Black	10	2,150.58		Scotia, New York

	140782	Electronic Measuremt	Electronic Measuremt	TCR 10S90	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DIRECT CURRENT POWER SUPPLY 10 V, 90 A: *Direct Current Power Supply*	1	999.27		Scotia, New York

	140694	Electronic Measuremt	Electronic Measuremt	HCR 10-25	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. DIRECT CURRENT POWER SUPPLY, 10 V, 25 A: *Direct Current Power Supply*	4	400.11		Scotia, New York

	39314	Electronic Measuremt	Electronic Measuremt	ESS 400-25	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. EMI DC POWER SUPPLY: Direct Current Power Supply Face plate may be Blue or Black	1	3,250.87		Scotia, New York

	119557	Electronic Measuremt	Electronic Measuremt	TCR 20T500-4-D-OV	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. EMI DC POWER SUPPLY 20V, 500A: *Direct Current Power Supply*	5	3,500.94		Scotia, New York

	78955	Electronic Measuremt	Electronic Measuremt	TCR 300S9	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. EMI DC POWER SUPPLY 300V, 9A: *Direct Current Power Supply*	2			Scotia, New York

	140783	Electronic Measuremt	Electronic Measuremt	TCR 10S240	DC Power Supplies in PVD Power Supplies ELECTRONIC MEASUREMENTS INC. EMI DIRECT CURRENT POWER SUPPLY 10 V, 240 A: *Direct Current Power Supply*	2	1,250.33	F*	Scotia, New York

	142882	Elgar	Elgar	1001SL-12	Power Supplies - Other in PVD Power Supplies ELGAR AC POWER SOURCE: *AC Power Source*	1	2,500.67	F*	Scotia, New York

Displaying 1-100 of 267 Page 1 2 3

Item ID

Photo

Short Description

Product Type / Details

Notes

190633

Absopulse Electronic

HVI 2K-750/24-3U3-S5037

in PVD Power Supplies

ABSOPULSE ELECTRONICS DC TO DC CONVERTER 2000 WATT:

DC to DC Converter

New Surplus -- Never Used

Scotia, New York

190548

Absopulse Electronic

CTP5K-750/3P480-3U7-S5037

in PVD Power Supplies

ABSOPULSE ELECTRONICS SINE WAVE INVERTER 5000VA :

New Surplus -- Never Used

Scotia, New York

190552

Absopulse Electronic

CTP 9K-750 3P480-3X3U4 3U7 19-S5344

in PVD Power Supplies

ABSOPULSE ELECTRONICS THREE PHASE INVERTER 9kVA:

Three Phase Inverter
New Surplus -- Never Used

Scotia, New York

147789

Acopian OEM*

B2G170

in PVD Power Supplies

Acopian B2G170 Regulated Power Supply:
Acopian B2G170 Regulated Power Supply

Regulated Power Supply

Plano, TX

104062

Acopian OEM*

D15-10

in PVD Power Supplies

Acopian Part Number D15-10:
Supply 15V 100MA Power

Hudson, NY

104063

Acopian OEM*

D15-10A

in PVD Power Supplies

Acopian Part Number D15-10A:
Supply 15V 100MA Power

Hudson, NY

104064

Acopian OEM*

D15-35

in PVD Power Supplies

Acopian Part Number D15-35:
Supply 15V 100MA Power

Hudson, NY

115716

Acopian Mfr*

DB15-35

in PVD Power Supplies

Acopian Part Number DB15-35:
Power Supply

Hudson, NY

49690

Advanced Energy

ATX-600

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY IMPEDANCE MATCHING NETWORK CONTROLLER:

Controller for Impedance Matching Network

Controller for the Advanced Energy Impedance Matching Network.
Matching network is not available.

Scotia, New York

140340

Advanced Energy

Apex 3013

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY 3000 WATTS 13.56 MHZ:

Radio Frequency Generator

The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.

Scotia, New York

139488

Advanced Energy

PEII-10K

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ:

Radio Frequency Generator

Representative photo

Scotia, New York

208186

Advanced Energy

PEII-10K

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RADIO FREQUENCY GENERATOR POWER SUPPLY, 10000 WATT, 40 KHZ:

Representative photo

Scotia, New York

175885

Advanced Energy

3152522-001B / RAS Split Inductor

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RAS SPLIT INDUCTOR:

The RAS Split Inductor is designed for use with Advanced Energy PE
or PEII 10 kW (or lower) power supply systems

Scotia, New York

225628

Advanced Energy

PE 10K

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY REMOTE MINI-PANEL :

PE 10K Remote Mini-Panel

Scotia, New York

1007

Advanced Energy

LF5

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY :

RF Generator w/Matching Network

Formerly RF Power Products

Scotia, New York

190763

Advanced Energy

RF10S

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1000 WATT 13.56 MHZ:

Radio Frequency (RF) Generator

Power Supply Part No: 3150014-000 G4 SE

Scotia, New York

207153

Advanced Energy

Apex 1500/13

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 1500 W 13.56 HZ:

Radio Frequency Generator

Scotia, New York

42967

Advanced Energy

Apex 3513

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF GENERATOR POWER SUPPLY 3.5KW:

Radio Frequency Generator

The Advanced Energy Apex Series of RF generators provide higher power density, greater delivered power repeatability and increased reliability.

Scotia, New York

3464

Advanced Energy

PDX9002V

Radio Frequency (RF) Generators

in PVD Power Supplies

ADVANCED ENERGY RF PLASMA GENERATOR POWER SUPPLY 900W, 350 KHZ:

RF Plasma Generator

2,600.70

Scotia, New York

4397

Advanced Energy

3500

in PVD Power Supplies

ADVANCED ENERGY/VEECO ION BEAM DRIVE:
Ion Beam Drive for Veeco 10" Source

Item sold AS IS, inquire on price

Scotia, NY

84596

Agilent

E3614A

in PVD Power Supplies

AGILENT DC POWER SUPPLY:

Direct Current Power Supply

440.12

Scotia, New York

80199

Airco Temescal

VES 2550

in Deposition Equipment

AIRCO TEMESCAL ELECTRON BEAM DEPOSITION SYSTEM, 4 POCKET:

E-Beam Deposition System

Scotia, New York

1827

Airco Temescal

SFIH2701

in Deposition Equipment

AIRCO TEMESCAL SINGLE CRUCIBLE ELECTRON BEAM SOURCE:

Single Crucible Electron Beam Source

3,751.00

Scotia, New York

219773

Applied Materials

AKT 1600

in Single Wafer Sputtering Tools

AKT APPLIED MATERIALS SPUTTERING TOOL:

Cluster Sputtering Tool

Scotia, New York

198656

Alpha Scientific Ele

Magnet Power Supply 315 kW

in PVD Power Supplies

Scotia, New York

245275

Applied Materials

EPI5

in Epitaxial Reactors

AMAT EPI CENTURA HTF (EPI5):

Software Ver: B6.30

CB1 Amps: 300A

SBC Type: V452

Flow Point Model: Nano Valve

Gas Panel Type: Configurable

Wafer Size: 200mm (with conversion kit 150mm is possible)

M-Monitor: CRT

3 Chambers ATM EPI

With digital Flow-Control of the cooling systems with interlock and passphrase (Simens PLC)

HDD was upgraded to RAID System

Tool called "EPI5"

Villach, Carinthia

218746

Applied Materials

P5000

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Amat P5000 CVD Tool:

P500048

8 inch tool with 4 CVD chambers.

Tool still in Production until (Planned until 3.23)

Villach, Carinthia

57073

Applied Materials OEM*

1140-01137

in PVD Power Supplies

AMAT Part Number 1140-01137:
DC Power Supplies in Power Supplies

POWER SUPPLY, 5VDC 30AMP

Hudson, NY

57074

Applied Materials OEM*

1140-01140

in PVD Power Supplies

AMAT Part Number 1140-01140:
DC Power Supplies in Power Supplies

POWER SUPPLY, 24VDC 25AMP

Hudson, NY

245288

AMAT

P5000

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

AMAT, P5000, 200mm, S/N 4862:

AMAT, P5000, 200mm, S/N 4862

Singapore

246605

Applied Materials

Ultima CENTURA DCVD

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

AMAT, Ultima CENTURA DCVD, 200mm, S/N 302959:

AMAT, Ultima CENTURA DCVD, 200mm, S/N 302959

2 chms.

Singapore

228193

AMAT AKT

AKT 15 K

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

APPLIED MATERIALS AKT GEN 5 PECVD CHAMBER:

Chambers are unused and were never commissioned.

Susceptor, gas shower and other chamber kitting not included.

Scotia, New York

228194

AMAT AKT

AKT 25 K

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

APPLIED MATERIALS AKT GEN 6 PECVD CHAMBER:

Chambers are unused and were never commissioned.

Susceptor, gas shower and other chamber kitting are not installed.

Scotia, New York

229902

AMAT AKT

0690-01681

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

APPLIED MATERIALS AMAT 0690-01681 CLAMP FLG SGL-CLAW NW160,200:

CLAMP FLG SGL-CLAW NW160,200

Item is in new condition sealed in its original packing.

Browse our large inventory of Applied Materials AKT PECVD GEN 5 & GEN 6 Parts. Including 25K/15K Process Chambers, Susceptors, Chamber Liners, Kitting and much more.

Check out our full list here: Applied Materials AKT PECVD New/Used Surplus Parts List

Scotia, New York

229925

APPLIED MATERIALS AMAT 0690-01681 CLAMP FLG SGL-CLAW NW160,200

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

APPLIED MATERIALS AMAT 0690-01681 CLAMP FLG SGL-CLAW NW160,200:

CLAMP FLG SGL-CLAW NW160,200

Item is in new condition sealed in its original packing.

Browse our large inventory of Applied Materials AKT PECVD GEN 5 & GEN 6 Parts. Including 25K/15K Process Chambers, Susceptors, Chamber Liners, Kitting and much more.

Check out our full list here: Applied Materials AKT PECVD New/Used Surplus Parts List

Scotia, New York

228262

AMAT AKT

N/A

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

APPLIED MATERIALS AMAT AKT FIXTURE DIFFUSER LIFTING 25KAXI:

FIXTURE DIFFUSER LIFTING 25KAXI

New surplus - item is brand new, in OEM crate. Photo of crates is a representative photo.

Scotia, New York

228247

AMAT AKT

0244-74553 REV.2

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

APPLIED MATERIALS AMAT AKT GEN 5 15K SUSCEPTOR:

KIT SUSC FSW 1/4 CEN GTP SS 1200X1600 15

New surplus - item is brand new, in OEM crate. Photo of crates is a representative photo.

Scotia, New York

228260

AMAT AKT

0244-74553

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

APPLIED MATERIALS AMAT AKT GEN 5 15K SUSCEPTOR:

KIT SUSC FSW 1/4 CEN GTP SS 1200X1600 15

New surplus - item is brand new, in OEM crate. Photo of crates is a representative photo.

Scotia, New York

228261

AMAT AKT

0244-74554 REV.3

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

APPLIED MATERIALS AMAT AKT GEN 6 25K SUSCEPTOR:

KIT SUSC FSW 1500X1850 W/O BSHING

New surplus - item is brand new, in OEM crate. Photo of crates is a representative photo.

Scotia, New York

225959

Applied Materials

Chemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

Scotia, New York

225956

Astex

2.5kW

Radio Frequency (RF) Generators

in PVD Power Supplies

Astex 2.5kW switching microwave generator set:

The complete tested, refurbished 2.5kw microwave generator set includes:
- 19-inch rack-mounted switching power supply equipped with both local (front panel) and remote (computer) control functionality.
- Water-cooled 2.5kW magnetron head with variable output.
- Water-cooled 3-way circulator.
- All interconnecting cables for the above components.
Operational and ready to ship with relatively short lead-time.
Limited warranty can be considered depending on the application.

Leominster, Massachusetts

213180

Astex

AX2518

Radio Frequency (RF) Generators

in PVD Power Supplies

ASTeX AX2518 SmartPower Microwave Power Supply:

Used switching power supply for use in ASTeX 1.8kW SmartPower magnetron head.
Cline Innovations maintains a microwave test bench and has experience testing 3.0kW ASTeX MKS SmartPower goods. Unfortunately, we do not have the full set of compatible components necessary to test this 1.8kW power supply type.
Testing at Cline Innovations using compatible goods (including 1.8kW magnetron head) supplied by the Buyer can be considered!
Goods can be sold with a limited warranty.

Leominster, Massachusetts

184607

Astex

AX5000, AX6000, AX6350 or similar

in Production Tools

Astex AX5000 Microwave Plasma Diamond Growth System:

Cline Innovations has all components necessary to refurbish and reintegrate a 5kW Astex MPCVD system for R&D or limited production.
System can be rebuilt based on customer's application needs using a combination of reliable, new and used/refurbished components.
Alternatively, a kit of core components can be offered for skilled users interested in building their own system.
This general system type enables growth of nanocrystalline. polycrystalline, or single crystal diamond (SCD) depending on configuration and operating conditions.
1.5kW to 5kW microwave power input.
3 stage options: Cooled, Heated, or Thermally Floating.
Integration with computer controls is strongly recommended.
Chamber designs vary by vintage, but can be confirmed at the time of quotation.
Please note that the chamber shown in the attached image is a new chamber. The most typical configuration involves the use of a used, professionally-refurbished double-jacked, water cooled chamber of the same general AX5000 design.

Leominster, Massachusetts

189843

Astex

AX6500 "Clamshell" MPCVD

in Production Tools

Astex AX6500 Bottom-launch Diamond Growth System:

This in-stock equipment is offered for domestic sale within the USA only.
Microwave Plasma CVD (MPCVD) "Clamshell" diamond deposition system designed & produced by Astex.
Capable of high rate single-crystal diamond (SCD) homoepitaxy as well as growth of polycrystalline, nanocrystalline (NCD or UNCD).
System is in the process of being refurbished with a majority of refurbishment already completed with the focus on improved purity, process control, and system safety:
- Chamber cleaning,
- Computer control updates,
- Higher throughput water cooling subsystem,
- Replacement of selected o-ring components with metal seals, and
- Enhanced process control/monitoring devices.
The AX6500 employs a unique, bottom-launched microwave plasma apparatus rated for up to 8kW of 2.45GHz microwave input.
Top-loaded, water-cooled aluminum chamber with water-cooled stage. Copper stage is typically shielded with special fixtures during plasma processing.
Photo Note: System photo shown include a similar quality, similar vintage system sold in the past. Actual photos or inspection available to qualified customers only.

Leominster, Massachusetts

168802

Astex

HS

Radio Frequency (RF) Generators

in PVD Power Supplies

Astex HS Air-Cooled Magnetron Head:

For use with compatible Astex switching microwave power supplies.

Leominster, Massachusetts

168804

Astex

HS-1000, HS1000

Radio Frequency (RF) Generators

in PVD Power Supplies

Astex HS-1000 Air-Cooled Magnetron Head:

For use with compatible Astex switching microwave power supplies.

Leominster, MA

168803

Astex

HS-1500, HS1500

Radio Frequency (RF) Generators

in PVD Power Supplies

Astex HS-1500 Air-Cooled Magnetron Head:

For use with compatible Astex switching microwave power supplies.

Leominster, MA

137483

Astex

ECR-MOCVD-PECVD

in Production Tools

ASTeX Large Volume Plasma Processing System (ECR-PECVD-MPCVD-MOCVD):

High density plasma system activated by ECR-enhanced, 2.45GHz microwave input offers PECVD-MOCVD deposition, functionalization, and/or dry etching of ceramics, carbon-based materials, and nanomaterials at relatively low substrate temperatures.

Computer-Controlled, low pressure, high power-density, microwave plasma system equipped with a large 28-inch dia X 51-inch long cylindrical SS chamber with full-diameter doors on each end and many ISO 150 & 250 flanges. Two Astex 2.5kW to 5KW microwave generators are used to power two permanent-magnet high-power ECR (Electron Cyclotron Resonance) sources. A planetary motion feedthrough is mounted on the top of the chamber and is equipped with RF-bias functionality (if needed) and planetary fixturing. Flexible system design is currently configured for simultaneous, high-rate, PECVD-MOCVD deposition of ceramic oxides onto many 3-D parts using gas, vapor and liquid reactants and no external heating.

Potential future uses range from large area (or large volume) PECVD (or plasma MOCVD) deposition of ceramics, semiconductors, DLC, nanodiamond, nanomaterials as well as surface treatment, functionalization and/or dry plasma etching.

This is a flexible R&D or semi-production system that was originally installed in the 1999 timeframe and used for high deposition-rate oxide PECVD/MOCVD research for less than 3-½ years. Most, if not all, of the research was focused on silicon oxide studies with rates measured in the micron/minute range using up to 10KW (2 X 5KW) of microwave power input enhanced with two ECR magnets.

Leominster, Massachusetts

206579