System Consist of Two Chambers Segregated by a rectangular Gate Valve With a Specimen Transfer System
Chamber 'A' Ion Milling Turbo Pumped Chamber size: 23"W x 28.5"D x 9"H Chamber Access: Doors on Front and Side of Chamber Two vacant 6" ports top of chamber,one KF 40 rear of chamber, Specimen Transfer: Gear Driven Chamber to Chamber Ion Mill: Commonwealth 3CM Ion Source Turbo Pump: Varian TV 250 Vacuum Gauges: Ion and Thermocouple Chamber Heat: 1000 Watt Quartz Heater Chamber view port: 3" Specimen Rotation Specimen Platten #1 18.5" Diameter,Four 5" Wafers Plus four detents for 4", 2.5" and 3" Wafers Specimen Platten #2 18.5" Diameter, Four 6" Wafers Two above platens supplied with system
Chamber 'B' Sputtering Cryo Pumped Chamber size: 23"W x 28.5"D x 9"H Chamber Access: Doors on Front and Side of Chamber Two Vacant KF 40 Ports top of Chamber,Four 1"Dia. ports bottom of chamber Chamber view port: 3" Specimen Rotation Motorized Shutter Vacuum Gauges: Ion and Thermocouple Cryo Pump: CTI Cryogenics Cryo Torr 8 Compressor: CTI Cryogenics 8200 Cathodes: Five Siera Applied Sciences 6" DC Magnetron
Control Components Commonwealth IBS 250 Ion Source Controller Varian Dual Gauge Controller Varian V250 Turbo Pump Controller Pinnacle DC Magnatron Drive |